| Electron System | Resolution | 5nm (30kV, SE Image) |
| Magnification | 20x~100,000x | |
| Accelerationg Voltage | 1~30kV (1/5/10/15/20/30) | |
| Detector | Secondary Electron Image(SE) | |
| Electron Gun | Pre-centered Tungsten Filament Cartridge | |
| Stage System | Stage Traverse | 5~axis System(X,Y,R,Z,T-Manual) X,Y-axis : 40mm / R-axis : 360˚ Z-axis : 0~35mm / Tilt-axis : 0~45˚ * Image Shift : ±150㎛ |
| Max. Sample Size | 80mm in Diameter x35mm in Height | |
| Image System | Automation Function | Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness |
| Image Format | BMP, JPEG, PNG, TIFF | |
| Vacuum System | Vacuum Mode | High Vacuum (Low Vacuum Option) |
| Vacuum Pump | Rotary Pump / Turbo Molecular Pump (Full Automation) |
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| Dimensions | Main Unit | 390(W) x 380(D) x 560(H)mm, 88kg |
| Controller Unit | 390(W) x 325(D) x 560(H)mm, 37kg | |
| Rotary Pump | 400(W) x 160(D) x 340(H)mm, 24kg |
▣ EDS System
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▣ Ion Sputter Coater
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