Electron System | Resolution | 15nm (30kV, SE Image) |
Magnification | 20x~60,000x | |
Accelerating Voltage | 1~30kV (1/5/10/15/20/30) | |
Detector | Secondary Electron Image (SE) | |
Electron Gun | Pre-centered Tungsten Filament Cartridge | |
Stage System | Stage Traverse | 3-axis System (X, Y, R - Manual) X, Y-axis : 40mm / R-axis : 360˚ * Image Shift : ±150㎛ * Tilt-axis : 0~45˚ (Option) |
Max. Sample Size | 70mm in Diameter x 30mm in Height | |
Image System | Automation Fuction | Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness |
Image Format | BMP, JPEG, PNG, TIFF | |
Vacuum System | Vacuum Mode | High Vacuum |
Vacuum Pump | Rotary Pump / Turbo Molecular Pump (Full Automation) |
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Dimensions | Main Unit | 390(W) x 380(D) x 560(H)mm, 83kg |
Controller Unit | 390(W) x 325(D) x 560(H)mm, 37kg | |
Rotary Pump | 400(W) x 160(D) x 340(H)mm, 24kg |
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